SynopsisSingle wafer process tool provides versatile autonomous process capabilities with particle control on a nano-scale, built on an efficiently small footprint and covers up to 300 mm in wafer size, thin wafers, ICS, MEMS, LED, photo masks and glass substrates tha.....
SynopsisVapor phase epitaxy is a method of growing single crystal thin layers. Vapor phase epitaxy is a special method of chemical vapor deposition in a broad sense: in the vapor phase, the semiconductor material is deposited on a single wafer, so that it grows a laye.....
SynopsisSpin Rinser Dryer is a kind of wafer dryer which can wash away any residue left by the previous process steps, and then dry the wafer. The global Spin Rinser Dryers market was valued at US$ million in 2023 and is anticipated to reach US$ million by 2030,.....
SynopsisIPA Dryer uses the difference between the surface tension of deionized water and isopropyl alcohol (IPA) vapor to produce a gradient that generates fast and effective drying of substrates.CLV Dryer is a combination of two proven technologies: vacuum and isopro.....
SynopsisThe continuing miniaturization and diversification of semiconductor devices increasingly requires wet cleaning systems that can prevent damage to fragile patterns while controlling microscopic particles.Single Wafer Cleaning Machine focus on providing the grea.....
SynopsisSemiconductor Wet Benches are stations for wet etching and cleaning of wafers and devices.The semicoundutor wet benches are designed and manufactured to support various wet processes and wafer carrier sizes.And can be manual,semiautomatic or automatic. T.....
SynopsisThe pneumatic bellows pump is a positive displacement pump. That is, a reciprocating pump whose working chamber is a bellows. The bellows is isolated from the atmosphere, forming a closed working cavity. The pneumatic bellows pump is a leak-free pump. The bell.....
SynopsisHigh Purity Dosing Pump is a positive displacement chemical dosing device with the ability to vary capacity manually or automatically as process conditions require. The high purity metering pumps are specialty pumps: They’re designed for precision-injection of.....
SynopsisA Pneumatic Double Diaphragm Pump is a type of positive displacement (PD) pump. It consists of two pumping chambers that are alternately filled and discharged by the movement of flexible diaphragms. Compressed air is alternately fed to, and vented from, air ch.....
SynopsisA Piston metering pump moves a precise amount of liquid during a specified time period yielding an accurate volumetric flow.A piston driven pump is a positive displacement method where the piston displaces the fluid in the reservoir chamber. Often piston pumps.....
