The Market Reports

Synopsis
The global market for Semiconductor Precursor Delivery System was estimated to be worth US$ 497 million in 2024 and is forecast to a readjusted size of US$ 811 million by 2031 with a CAGR of 6.7% during the forecast period 2025-2031.
This report provides a comprehensive assessment of recent tariff adjustments and international strategic countermeasures on Semiconductor Precursor Delivery System cross-border industrial footprints, capital allocation patterns, regional economic interdependencies, and supply chain reconfigurations.
The semiconductor precursor delivery system is a core subsystem in semiconductor manufacturing, used to safely and accurately deliver liquid or solid precursors (such as silane, TEOS, tungsten hexafluoride, etc.) to the chemical vapor deposition (CVD) or atomic layer deposition (ALD) reaction chamber. Its core components include precursor storage sources (high-pressure gas cylinders, heated sublimation chambers), precision flow and pressure controllers (such as mass flow meters MFC), corrosion-resistant gas pipeline networks (stainless steel/inert coatings), safety isolation devices (gas cabinets, leak detection and exhaust gas treatment systems) and automated integration interfaces. The system ensures precursor purity (>6N) and delivery stability through temperature control, real-time monitoring and high-speed valve switching (such as ALD pulse sequences), while preventing the risk of leakage of toxic substances (such as arsenic). Its performance directly determines the uniformity of thin films, doping accuracy and device reliability, and is a key support for the mass production of advanced processes (3nm nodes, gate-all-around transistors) and new materials (high dielectric layers, two-dimensional semiconductors).
As semiconductor technology moves towards smaller nodes and complex structures, delivery systems continue to upgrade to meet challenges. For example, multi-precursor manifolds support multi-element nano-stacks (such as HfO₂-Al₂O₃), in-situ optical/mass spectrometry monitoring enables closed-loop process control, and cluster tools integrate multi-step processes to reduce contamination. The system must also be compatible with extreme process requirements, such as nickel-based alloy pipelines that are resistant to hydrogen fluoride corrosion, thermal oxidation exhaust gas treatment devices, etc. These innovations not only improve deposition efficiency and material properties, but also promote the industrialization of advanced logic chips, memory, and third-generation semiconductors (such as GaN and SiC). Any slight fluctuation may lead to film defects, so high-precision delivery systems have become an indispensable "vascular network" in semiconductor equipment, supporting the continued evolution of Moore's Law.
Semiconductor precursor systems mainly refer to liquid delivery systems (LDS). The statistical scope of this article does not include supply systems for gas delivery (such as special gas cabinets, special gas racks, etc.).
The semiconductor precursor delivery system is a device used to deliver precursors. Depending on the type of precursor, the delivery system can be divided into a gas delivery system, a liquid delivery system (LDS), and a solid delivery system. With the growth of downstream application demand for precursors, the growth of the precursor delivery system market has been further promoted. It is expected that by 2031, the market size will exceed 700 million US dollars.
From the production side, the core production areas of semiconductor precursor delivery systems are mainly Europe, the United States, South Korea and Europe, among which Europe is the most important production area, accounting for 37.9% of the market share in 2024. There are still differences in the application, technology and product performance of Chinese semiconductor precursor delivery system companies and international leading companies (such as Merck and Air Liquide) in the field of advanced processes. However, as the localization process of Chinese local manufacturers accelerates, some Chinese local companies have also gained a certain market share in the precursor delivery system market, such as Jiangsu Yoke Technology and PNC Process Systems Co., Ltd. In addition, in recent years, there have been many new entrants from Chinese local enterprises, such as Shanghai Wisdom Technology, Hefei Adchem, etc., but at present, the scale is relatively small. With the development of China's semiconductor market in the future, it is expected that the global competition share of Chinese local manufacturers will gradually increase in the next few years, and China will maintain the fastest growth rate. With the advancement of domestic precursor delivery system technology, the emergence of cost advantages and the strengthening of policy support, it is expected that the share will reach 23.7% in 2031.
From the perspective of manufacturers, the core manufacturers of semiconductor precursor delivery systems worldwide mainly include Merck Group, Air Liquide, Entegris, CSK, Foures Co., Ltd (Jiangsu Yoke Technology), PNC Process Systems Co., Ltd, etc. In 2024, the world's first-tier manufacturers are mainly Merck Group and Air Liquide, with a market share of approximately 40.89%; the second-tier manufacturers include Entegris, CSK, Foures Co., Ltd (Jiangsu Yoke Technology), PNC Process Systems Co., Ltd, etc., with a total share of 42.65%.
This report aims to provide a comprehensive presentation of the global market for Semiconductor Precursor Delivery System, focusing on the total sales volume, sales revenue, price, key companies market share and ranking, together with an analysis of Semiconductor Precursor Delivery System by region & country, by Type, and by Application.
The Semiconductor Precursor Delivery System market size, estimations, and forecasts are provided in terms of sales volume (Units) and sales revenue ($ millions), considering 2024 as the base year, with history and forecast data for the period from 2020 to 2031. With both quantitative and qualitative analysis, to help readers develop business/growth strategies, assess the market competitive situation, analyze their position in the current marketplace, and make informed business decisions regarding Semiconductor Precursor Delivery System.
Market Segmentation
By Company
Merck Group
Air Liquide
Entegris
CSK
Foures Co., Ltd
PNC Process Systems Co.,Ltd
Sempa Systems GmbH
Fujifilm
SMI Co., Ltd
Brooks Instrument
Ceres Technologies
HORIBA
CollabraTech (Exyte)
Stainless Design Concepts (SDC)
Bronkhorst
SVCS Process Innovation
Shanghai Wisdom Technology
Segment by Type
Liquid Delivery System (LDS)
Solid Precursor Delivery Systems
Segment by Application
PVD/CVD/ALD Process
Epitaxial and Etching Process
By Region
North America
United States
Canada
Asia-Pacific
China
Japan
South Korea
Southeast Asia
India
Australia
Rest of Asia-Pacific
Europe
Germany
France
U.K.
Italy
Netherlands
Nordic Countries
Rest of Europe
Latin America
Mexico
Brazil
Rest of Latin America
Middle East & Africa
Turkey
Saudi Arabia
UAE
Rest of MEA
Chapter Outline
Chapter 1: Introduces the report scope of the report, global total market size (value, volume and price). This chapter also provides the market dynamics, latest developments of the market, the driving factors and restrictive factors of the market, the challenges and risks faced by manufacturers in the industry, and the analysis of relevant policies in the industry.
Chapter 2: Detailed analysis of Semiconductor Precursor Delivery System manufacturers competitive landscape, price, sales and revenue market share, latest development plan, merger, and acquisition information, etc.
Chapter 3: Provides the analysis of various market segments by Type, covering the market size and development potential of each market segment, to help readers find the blue ocean market in different market segments.
Chapter 4: Provides the analysis of various market segments by Application, covering the market size and development potential of each market segment, to help readers find the blue ocean market in different downstream markets.
Chapter 5: Sales, revenue of Semiconductor Precursor Delivery System in regional level. It provides a quantitative analysis of the market size and development potential of each region and introduces the market development, future development prospects, market space, and market size of each country in the world.
Chapter 6: Sales, revenue of Semiconductor Precursor Delivery System in country level. It provides sigmate data by Type, and by Application for each country/region.
Chapter 7: Provides profiles of key players, introducing the basic situation of the main companies in the market in detail, including product sales, revenue, price, gross margin, product introduction, recent development, etc.
Chapter 8: Analysis of industrial chain, including the upstream and downstream of the industry.
Chapter 9: Conclusion.

Index